SKTtech
NVLS 300mm Spindle Overhaul
Spindle Standard Overhaul Process
SKY TECH
Outgoing Final Confirmation
- noutgoing functional confirmation
1.vacuum leak check.
2.robotation check
3.up/down moving check
- noutlook parts visual inspection and cover installation
Rotation and up/down marathon test
NVLS Spindle Overhaul
NVLS Vector Failure Mode & Main Actions in Spindle :
•Up/Down moving not smoothly
üCylinder bushing consumed.— Bushing replaced.
üGrease & O’ring consumed.— O’ring & Grease replaced.
•Rotation overshoot/vibration.
üO’ring and Grease consumed.— O’ring and Grease replaced.
üBearing consumed.— bearing replaced.
üMagnet Bushing Consumed — replace magnet bushing
üGear box misalignment — Gear box overhaul
üMotor malfunction — Motor function check and overhaul
•Leakage issue.
üBellows Shaft consumed. — Bellows Shaft replaced.
üO’ring consumed. — O’ring and Grease replaced.
üMagnet Bushing Consumed — replace magnet bushing
•Particle issue
üVibrated caused by moving not smoothly.— As item1.
üImproper scratch caused by O’ring and Grease decay.— replaced O’ring and Grease.
Spindle Overhaul Key Actions
- Up/Down moving not smoothly —- Bushing replacement
Spindle Overhaul Key Actions
- Up/Down moving not smoothly —– O’ring and Greasing
Spindle Overhaul Key Actions
- Rotation Overshoot —– Bearing replacement & Greasing
Spindle Overhaul Key Actions
- Rotation Overshoot —– O’ring replacement & Greasing
—– Magnet Bushing Replacement
Spindle Overhaul Key Actions
- Rotation Overshoot —– Gear Box and Motor overhaul
Spindle Overhaul Key Actions
- Leakage Issue —– Bellows Shaft Replacement
Spindle Overhaul Key Actions
- Leakage Issue —– O’ring replacement & Greasing
—– Magnet Bushing Replacement
—– Shaft Overhaul or replacement
- Retrofitted item form standard to Fast spindle
- 1.Sensor and flag replaced.
- 2.signal cabled replaced
plastic cushion
